Sonotec Ultrasonic Clamp-on Flow Sensor
SEMIFLOW CO.65
SEMIFLOW CO.65 non-contact clamp-on flow sensors are ideal to measure abrasive, adherent, corrosive, and ultra-pure liquids on rigid plastic tubes and pipes used in the semiconductor industry. Equipped with an integrated electronic unit, they function as a complete flow meter in the size of a small transducer without an external board or transmitter.
- Highly precise ultrasonic clamp-on flow sensor
- flow measurement of up to 400 L/min
- Innovative contact-free architecture to eliminate rish of contamination and leakage
- Use at PFA or other hard plastic tubes and pipes
- No system downtime in case of sensor exchange or retrofit
- Sensor set for hazardous environments according to ATEX / IECEx (EX Zone 1)
- Support of all current industrial interfaces
SEMIFLOW® CO.65 Clamp-On Flow Sensor for Semiconductor Applications
Excellent Measurement Performance
Real-time instantaneous flow measurement and volume totalizing
Reliable flow measurement up to 400 L/min
Accuracy of +/- 2%
Technical Sensor Properties
Plastic housing (PVC-C) and plastic connector (PA)
Screwed lid and flexible inlay for optimal coupling between tube and transducer
Plug & Play Sensor Fit
Integrated electronics board and analysis unit
8 different sensor sizes (¼", 3/8", ½", (¾"), 1", 1.32“, 40A, 50A OD) for a wide range of tube sizes
Ideally suited for PFA and other hard plastic tubes and pipes
Easy System Integration
Easy integration into existing PLC or pump systems via RS-485 interface
Optional C³ Software to provide user-friendly sensor operation, configuration and calibration
| Measuring Method | Ultrasound |
| Measurement Method | Flow measurement with transit-time principle |
| Measuring Cycle | 10 ms |
| Outer Diameter - Tubing | 1/4“ ... 50 A |
| Operating Voltage | 12 ... 30 VDC |
| Interfaces | 0/4 ... 20 mA, 0 ... 20 kHz*, PNP* / NPN / Push-Pull*, RS-485 / Modbus, digital input * Only available for SEMIFLOW CO.65 |
| Current Consumption | 30 mA max. |
| Media / Ambient Media Temperature | 0 ... +90°C > at 0 ... +25°C ambient, 0 ... +60°C > at 0 ... +60°C ambient |
| Protection Class | IP65 |
- Single wafer cleaning equipment
- Lithography equipment
- Mixing equipment
- Chemical supply system
- Slurry lines
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At Liquidyne, we prioritize our commitment to quality and consistency. In 2017 we achieved ISO 9001:2015 Quality Management System certification to ensure we can repeatedly deliver consistently high-quality products and solutions. Being ISO 9001:2015 QMS Certified by Amtivo (USA), Inc, together with our USP Class VI Testing, ASME Bioprocessing Equipment (BPE), and EHEDG certification guarantee, we have the methodologies to assure quality. We will quickly and accurately rectify any issues if any of our products are ever in non-conformance.
